Canon releases FPA-3030i6 semiconductor lithography system for small wafers, with a newly developed lens and a variety of options to meet the growing demand for power devices
TOKYO, September 24, 2024—Canon Inc. announced today the release of the FPA-3030i6 i-line
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stepper, a new semiconductor lithography system for processing wafers with a diameter of 8 inches (200 mm) or smaller.
FPA-3030i6
The newly developed lens...
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